Durham, North Carolina

341,298 square feet on 73.62 acres

General Summary

            Beautiful masterplanned corporate campus

            341,298 square feet on 73.62 acres

            Ample room for expansion

            Includes recreational facilities for employees

            Expansive Class 10, 1,000 and 10,000 clean rooms

Extensive support facilities & systems for high technology production, assembly & testing

            Abundant skilled labor

            Pro-business government

Facility Details

            Campus currently comprised of 5 buildings on 73.62 acres which total 341,298 square feet broken down as follows:

Land:                        73.62 acres

Zoning:                     I-2       City of Durham

Date of Construction and Condition:

Construction:

Ceiling Heights:

Electric Power:

            Supplier:                       Duke Power Company

            Substation & Circuits:

                        Primary Feed:               Weaver 100 kV/ 24.94kV Substation

                                                            No. 2405 24.94 kV Circuit

Backup Feed:               Farntosh 100 kV/ 24.94kV Substation

                                                            No. 2410 24.94 kV Circuit

            Back-up Power:

                        Emergency Generator:

            1-275 kW diesel generator @ 480 Volts 3 phase 4 wire

            1-500 kW diesel generator @ 480 Volts 3 phase 4 wire

UPS System:

            Assembly/Test:  375 kVA (3-125 kVA Units)

Wafer Fabrication:  700 kVA (2-350 kVA Units)

UPS Systems power emergency lights and warning systems, building control systems, computer room and life safety (exhaust, lights, etc.).

Lighting Systems:

Natural Gas:

            Supplied by Public Service Co. of North Carolina

                        4” main line serves 3” service line with 2” meter to plant

                        Back up fuel for boilers is oil which is stored in an 8,000 gallon above-ground tank.

Water Supply:

            Supplied by City of Durham

            42” main line supplies 16” feeder line to plant.

            1,000,000 +/- GPD available to plant.

            (Can get more water with permits and new city water meter.)

Sewer:

            Supplied by City of Durham

            8” process line with 1,000,000 GPD capacity

            TEER TECH’s 6 month average:  550,000 GPD

Fire Protection Systems:

Restrooms:

Process Systems

Assembly/Test Building

·        Description

            The Assembly Test building at Mitsubishi Semiconductor America Inc. is a two story building that was used to assemble 16 meg and 64 meg Dram.  The building is about 145,000 square feet that includes offices, utility, laboratory, production support and 25,240 sf class 10,000 clean room (25,240 sq. ft).  Support systems with capacities are listed below:

Clean Room:

·        Description

                        25,240 square foot "ball room" style class 10,000 clean room with HEPA filtration.  Standard lighting with white lights.  Ceiling to floor height is 8' - 10".  Air (147,000 cfm) is supplied to filters by (5) air handling units by insulated ductwork at 40 room air changes per hour.  Air is returned to the units through floor grating and side wall grates.  The under floor is presently utilized for tool and facility infrastructure support. Temperature and humidity are controlled to 73.4F +/- 5.0 F, 50% +/- 10% RH.  The Clean room maintains at least .05" H2O over atmospheric.   

·        Particle monitoring

                        Particles are monitored locally.

·        Air Handlers

Outside air is provided by (2) units for 20,250 cfm of air to maintain positive pressure.  (5) air handlers circulate 147,000 cfm of air (with manual redundancy) to the clean room.  Separate air handlers provide cooling to office and support areas.

·        Exhaust Treatments

There are two (scrubbed and heat) different types of exhaust treatment systems they are detailed below:

·        (3) Wet scrubbers designed for 5,000 cfm each.  

·        Heat exhaust for DWWM line designed for 2000 cfm with fan redundancy.

·        Re-circulation heat exhaust

·        Laser marker exhaust at (2) - 450 cfm each.

·        Module 1 exhaust

Oven exhaust that operates only when the oven is opened.

·        D.I. Water

The D.I. water for the Assembly Test building is fed from the large plant located in the Facility Building.

·        High Purity Bulk Gases

                        Presently this building has house grade nitrogen.  This bulk system is located north of the Facility building and provides both our Assembly Test and Wafer Fab buildings gas.  The supplier was Praxair.

·        16 Meg. Tempered Water (TW)

                        The TW system is distributed in the under floor with 4" dia. copper piping.  There are redundant pumps, heat exchangers and filtration.  Cooling is provided by the building chilled water system.  The system is designed to maintain a temperature of < 60 deg. F and a differential pressure of about 70 psi.

·        Low Pressure Tempered Water (TWL)

                        Tanks and pumps are located in the under floor.  This system feeds water to the             tools and used gravity back to the tank.  Ambient air provides the cooling.

·        Process Cooling Water (PCW)

                        PCW is closed loop and cooled by a dedicated cooling tower located outside the          building.  The system has a PVC distribution system and redundant pumps.

·        Process Vacuum

                        The process vacuum system is used for the high vacuum requirements of the tools.  The system has three vacuum pumps capable of about 250+ ACFM with redundant pumps.  Present load is normally maintained with one pump. 

·        Chillers

There are (2) 650 ton, (2) 225 ton and (2) 250 ton water cooled chillers located in the mechanical space of the building used for HVAC and process cooling, discharge water temperature is 43 to 45 F.  All chillers are water cooled and are supported by cooling towers sized as follows: (3) - 750 gpm units and (2) 2325 gpm units.   

·        Power

                        The building has the following voltages available: 120v 1 phase, 208 v 1 & 3phase, 277v 1 phase (lighting), 480 v 3 phase.  Power panels for the various voltages are conveniently placed in the building.  The site is fed from two separate circuits:  one main and one standby, each rated at 24 MVA.  Assembly Test is served by  (3) 2500 kVA transformers which feed (2) 2500 amp substations and (1) 3200 amp substation.  The Facility building has a 2500 kVA transformer with 1600 amp switch gear.  All power is underground feeding switch gear 1000 MCM feeding dual switch gear. Dual runs of 1/0 24 kV cable that feeds each transformer. 

·        UPS power

                        There are (3) 125 kVA UPS units for a total of 375 kVA.  The facility monitoring system has a UPS that provides 15 kVA of power.

·        Emergency Generator

                        The emergency generator is fueled by diesel and is sized at 275 kW.  It feeds life safety items like exhaust systems and lighting.

·        Boilers

                        Three boilers are located in the mechanical space on the east side of the building and provide low pressure steam to outside air handlers,

circulation units and some hot water for office HVAC.  Two boilers are sized for 60 HP and one is 100 HP.

·        Fire Protection

                        The building is completely wet sprinkled.  On site is a 500,000 gallon     emergency/ sprinkler water tank that has a diesel pump.  The Data processing center is protected by FM 200 system (haylon replacement).

·        Compressed Air

                        Two compressors providing 400 cfm each are located in the Chiller building.  Two redundant air dryers provide <-60 deg C dew point air to the building. These compressors are water cooled with dedicated towers.

·        Waste Treatment

                        The waste water treatment operation is housed in the facility building. Treatment for the following exist: heavy metals, acids, bases and pH neutralization. 

·        Monitoring Capabilities

Continuous recording and monitoring of parameters is performed in the Facility building.  The System is PLC based and operates on a data highway.  Most PLC's on site are by Allen Bradley.

Assembly Test Service Specifications